Hexamethyldisilazane CAS 999-97-3

1. Hexamethyldisilazane is widely used in semiconductor manufacturing for surface modification, enhancing adhesion and hydrophobicity of substrates to improve electronic device performance . It also serves as a key precursor in synthesizing silicon-based polymers, nanomaterials, and silicon nitride for high-performance ceramics .
2. Hexamethyldisilazane CAS 999-97-3 is a standard derivatisation agent in gas chromatography-mass spectrometry (GC-MS), used to increase the volatility of polar compounds for better chromatographic separation and detection . It is also effective in creating protective coatings for metals and glass, offering resistance to corrosion and wear in automotive and aerospace industries .
3. Applications of Hexamethyldisilazane include its use as an organic synthesis intermediate and analytical reagent , as well as in research for developing complex molecules with precision and efficiency .

1. Store Hexamethyldisilazane in a tightly sealed container under inert gas (e.g., nitrogen) in a cool, dry, and well-ventilated place, as it hydrolyzes readily upon contact with moisture . Recommended storage is at room temperature (RT) in a cool, dark area .
2. Keep Hexamethyldisilazane strictly away from heat, sparks, open flames, strong oxidizing agents, and strong acids . It is highly flammable (flash point 11-27°C) and forms explosive mixtures with air .
3. Always Hexamethyldisilazane CAS 999-97-3 use appropriate personal protective equipment (PPE) including tightly fitting safety goggles, chemical-resistant gloves (nitrile rubber, minimum 0.4 mm thickness for full contact), and flame-retardant antistatic protective clothing . Handle only in a well-ventilated area or fume hood and avoid breathing vapors, mist, or gas .

1. Immediately isolate the spill area, eliminate all ignition sources, and ensure adequate ventilation . Use full personal protective equipment including self-contained breathing apparatus (SCBA) . Do NOT let Hexamethyldisilazane enter drains or waterways, as it is harmful to aquatic life .
2. Contain Hexamethyldisilazane using dry, inert, non-combustible absorbent material (e.g., Chemizorb®). Carefully collect the contaminated material using non-sparking tools into a sealed, labeled chemical waste container for proper disposal according to hazardous material regulations .
3. Personnel Hexamethyldisilazane CAS 999-97-3 must wear suitable PPE during cleanup. Under fire conditions, use carbon dioxide (CO₂) or dry powder as extinguishing media; DO NOT use foam or water . Hexamethyldisilazane is classified for transport (UN1992 or UN3286, Hazard Class 3/6.1, Packing Group II) .

1. Hexamethyldisilazane is classified with GHS signal word "Danger" . It is highly flammable (H225), causes severe skin burns and serious eye damage (H314/H318), is toxic if inhaled (H331), in contact with skin (H311), and harmful if swallowed (H302) . Acute toxicity data: LD50 oral rat 851 mg/kg, LC50 inhalation rat 10 mg/l/6h, LD50 dermal rabbit 547-589 mg/kg .
2. Hexamethyldisilazane is moisture sensitive and decomposes upon contact with water or humid air, releasing ammonia . It has a boiling point of 125-126°C, melting point of -78°C, density 0.77 g/mL, is insoluble in water but soluble in most organic solvents . Thermal decomposition produces toxic and irritating fumes including carbon oxides, nitrogen oxides (NOx), and silicon oxides . NFPA health rating is 1 (irritation only), but some sources indicate higher toxicity with H311/H331 ratings .
3. Always consult Hexamethyldisilazane CAS 999-97-3 the specific Safety Data Sheet (SDS) for Hexamethyldisilazane for complete hazard information, first-aid procedures (P305+P351+P338+P310 for eyes, P303+P361+P353 for skin, P304+P340+P310 for inhalation, P301+P330+P331 for ingestion), and handling instructions . Precautionary statements include P210 (keep away from heat/sparks/open flames), P233 (keep container tightly closed), P260 (do not breathe vapors), P273 (avoid release to environment), and P280 (wear protective gloves/eye protection) .